Electron Ionization Cross Sections of PF3 Molecule

Partial single and double differential cross sections with their sums through direct and dissociative ionization of PF3 have been evaluated at fixed electron energies 100 and 200 eV, by using modified Jain-Khare semi-empirical approach. To the best of my knowledge no other data of differential cross sections are available for the comparison. I have also calculated integral ionization cross sections with their ionization rate coefficients by using M-B distribution. No other data of partial ionization cross section are available till now. The sum/or total of evaluated partial cross sections reveal good agreement with available theoretical data.